FC-R7700 (AERA)
Mass Flow Controller
As the field-proven standard for a range of applications, Hitachi Metal’s Aera® FC-R7700 series delivers precise flow control, while offering the economic benefits of elastomer seals.
For process and equipment engineers working in the semiconductor, flat panel display, data storage, industrial vacuum, and industrial coating markets, this series provides high reliability and superior performance for non-corrosive gas applications, including CVD, PVD, etch, ion implantation, sputtering, thermal oxidation, optical glass coating, optical fiber, surface treatment, and other coating processes.
Features & Benefits
Low Cost
Custom-made for applications that require top performance but not the corrosion resistance or
high leak integrity of metal seals, the FC-R7700 series is both cost-effective and precise.
Easy Integration
Obtain the performance and reliability advantages of Aera MFCs by replacing other brands—with
no installation hassles. Certain models feature standard electrical connectors and critical dimensions
to easily fit existing systems.
Fast Response
Advances in the FC-R7700 series’ technical design delivery enhanced performance compared to
competing mass flow controllers (MFCs). These advances include a highly sensitive, rapid-response,
small-diameter sensor. With normally-open and normally closed solenoid designs, the FCR7700 series
provides a fast response time. These speed enhancements minimize over-shoot and undershoot, and
produce an actual-flow settling time of < 2 sec between set points.
Dimensions
Specifications
