FC-2900/FM-3900 (TYLAN)
Mass Flow Controller
Designed to meet the exacting requirements of semiconductor processes and equipment, the Tylan FC2900 and FM3900 models are premium quality elastomer-sealed mass flow controllers and meters. These MFCs combine proven components and techniques with innovative concepts in both mechanical and electrical design.
Features & Benefits
● Autozero Digital Circuitry : Automatically resets outputs to zero under no flow conditions, and shifts the entire
calibration curve to cancel many effects of temperature coefficients and calibration drift.
● User-Selectable Response Time Option : Offers a quick (0.5 second) step response time in short-cycle
processes along with offering a controlled response for long processes.
● Temperature Coefficients : Maintains tight control in varying temperatures
● Balanced Power Load : Low lead current eliminates signal differing from its controlling device
● Power Operation : Insensitive to power supply variations, and will operate within ± 12 volts to ± 18 volts
● Standard Design : Industry standard pinouts and dimensions make the Tylan FC2900 easy to install in many
systems
Dimensions
Specifications
Performance
● Full Scale (N2 equivalent) :
FC2900: 10 sccm – 10 slpm
FC2910: 100 sccm – 50 slpm
(FC2910 used belw 10 slm for low vapor pressure material delivery)
● Shutdown : 2% full scale
● Step Response Time : 1 sec (dependent on step request and conditions)
● Accuracy : ± 1.0% full scale
● Linearity : ± 0.5% full scale
● Repeatability : ± 0.2% full scale
● Pressure Coefficient : 0.00001% per bar, 0.007% per psi (typical)
● Temperature Coefficient : 0.05% per °C (zero and span)
● Attitude Sensitivity : < 0.25% @ 90° C without autozero
Mechanical
● Valve : normally-open or normally-closed solenoid
● Materials : 316L stainless steel, 446 stainless steel, PFA Teflon®
● Elastomers Available : Viton®, Kalrez®, Neoprene
● Leak Integrity :
1 x 10-9 atm-cc per sec (He) inboard
<2% full scale with Teflon poppet (normally-closed)
<5% full scale with Teflon poppet (normally-open)
● Weight : 0.98 Kg (2 lb)
Electrical
● Supply Voltage : ± 12 VDC to ± 18 VDC
● Supply Current : 110 mA nominal (125mA max @±18VDC)
● Power Consumption : 3.3 watts @ ± 15 volts
● Input/Output Signal - 0-5 VDC
Environmental
● Operating Temperature : 5 – 50° C (ambient and gas)
● Humidity : 0 – 90% RH, non-condensing
● Maximum Inlet Pressure : 11.5 bar (150 psig)
● Differential Pressure : Nominal, 0.7 – 2.8 bar (10-40 psid)
Note: In accordance with SEMI Standard E12-91, Standard Temperature is 0° C
and Standard Pressure is 760 mm Hg (14.7 psia).