1. Frame 1 Set
2.Gas Line & Accessory 1 Set
-DI Valve : 1/4“, 4ea / Sw Manual
-In Line Filter 4ea & Check Valve 4ea
-Gas Mix Tube
-Cost Fabrication
3. Mass Flow Controller
- MFC MFC 4EA
- IMC1300-MMOO-O-I  / RS232C PORT / 4채널 PORT 구성
- MFC Cable- 30CM 4EA

목록