IMC1300-MMOO-O-I 3Channel
MFC 3EA / AR 2000SCCM / 1/4VCR / NF3 500SCCM / 1/4VCR / O2 500SCCM / 1/4VCR
DI Valve : 1/4“ VCR EP
하부 판넬 가공 / Material : AL 다이캐스팅 / EGI 판금 / NO 3.6PB 2.3/0.2X
MFC BLOCK
LINE SUS316 BELLOWS 1/4" 1/4VCR