1. Frame 1 Set
-Size : 343H36
-Material : AL 다이캐스팅 / EGI 판금
-NO 3.6PB 2.3/0.2
2.Gas Line & Accessory 1 Set
-DI Valve : 1/4“, 1ea
-In Line Filter & Check Valve
-Cost Fabrication
3. Mass Flow Controller
- MKS1179 MFC H2 2SLM
- MKS 179 MFM H2 2SLM
- IMC1300-MOOO-O-I
- MFC Cable
- RS232 Cable
-Size : 343H36
-Material : AL 다이캐스팅 / EGI 판금
-NO 3.6PB 2.3/0.2
2.Gas Line & Accessory 1 Set
-DI Valve : 1/4“, 1ea
-In Line Filter & Check Valve
-Cost Fabrication
3. Mass Flow Controller
- MKS1179 MFC H2 2SLM
- MKS 179 MFM H2 2SLM
- IMC1300-MOOO-O-I
- MFC Cable
- RS232 Cable