1. Frame 1 Set
-Size : 543H36 / 하부 판넬 가공
-Material : AL 다이캐스팅 / EGI 판금
-NO 3.6PB 2.3/0.2
3.Gas Line & Accessory 1 Set
-DI Valve : 1/4“, 3ea / Sw Manual
-In Line Filter 3ea & Check Valve 3ea
-Cost Fabrication
4. Mass Flow Controller ISVT500
- MFC (1SLM (N2 / 1/4SW 3EA) / SEAL : VITON SEALING
- IMC1300-MMOO-O-I  / RS232C PORT / 3채널 PORT 구성 추후 추가 장착 1채널 PORT 구성
- MFC Cable- 1M 3EA