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IV-MCB BOX Unit ( 4채널 MFC 컨트롤 박스) 
1. Frame 1 Set
-Size : 543H36 / 하부 판넬 가공
-Material : AL 다이캐스팅 / EGI 판금
-NO 3.6PB 2.3/0.2
3.Gas Line & Accessory 1 Set
-DI Valve : 1/4“, 4ea / Sw Manual
-In Line Filter & Check Valve
-line 오토웰딩 작업.
-Cost Fabrication
4. Mass Flow Controller BROOKS 5850E
- MFC (5SLM (NO 50% + NH3 50%) / 1/4SW 4EA) / SEAL : KALREZ SEALING
- IMC1300-MMOO-O-I  / RS232C PORT / 4채널 PORT 구성
- MFC Cable- 1M 4EA


1. Frame 1 Set
-Size : 543H36 / 하부 판넬 가공
-Material : AL 다이캐스팅 / EGI 판금
-NO 3.6PB 2.3/0.2
3.Gas Line & Accessory 1 Set
-DI Valve : 1/4“, 4ea / Sw Manual
-In Line Filter & Check Valve
-line 오토웰딩 작업.
-Cost Fabrication
4. Mass Flow Controller BROOKS 5850E
- MFC (N2 1000SCCM) / 1/4SW 4EA) / SEAL : KALREZ SEALING
- IMC1300-MMOO-O-I  / RS232C PORT / 4채널 PORT 구성
- MFC Cable- 1M 4EA




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