1. Frame 1 Set
-Size : 343H36
-Material : AL 다이캐스팅 / EGI 판금
-NO 3.6PB 2.3/0.2
2.Gas Line & Accessory 1 Set
-Ball Valve : 1/4“, 2ea
-In Line PALL Micro Filter & Check Valve
-Cost Fabrication
3. Mass Flow Controller
- MKS MFC 1479A ALL METAL GAS: H2S ( 100SCCM / 1/4VCR 1EA)
- MKS MFC 1179A GAS: N2 ( 1000SCCM / 1/4VCR 1EA)
- IMC1300-MOOO-O-I
- MFC Cable
-Size : 343H36
-Material : AL 다이캐스팅 / EGI 판금
-NO 3.6PB 2.3/0.2
2.Gas Line & Accessory 1 Set
-Ball Valve : 1/4“, 2ea
-In Line PALL Micro Filter & Check Valve
-Cost Fabrication
3. Mass Flow Controller
- MKS MFC 1479A ALL METAL GAS: H2S ( 100SCCM / 1/4VCR 1EA)
- MKS MFC 1179A GAS: N2 ( 1000SCCM / 1/4VCR 1EA)
- IMC1300-MOOO-O-I
- MFC Cable